Ultra Clean Processing of Semiconductor Surfaces XII: Selected, Peer Reviewed Papers from the 12th International Symposium on Ultra Clean Processing ... September 21-24, 2014, Brussels, Belgium - Couverture souple

 
9783038352426: Ultra Clean Processing of Semiconductor Surfaces XII: Selected, Peer Reviewed Papers from the 12th International Symposium on Ultra Clean Processing ... September 21-24, 2014, Brussels, Belgium
Couverture souple
ISBN 10 : 303835242X ISBN 13 : 9783038352426
Editeur : Trans Tech Publications Ltd, 2014

Synopsis

Collection of selected, peer reviewed papers from the 12th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS), September 21-24, 2014, Brussels, Belgium.
The 71 papers are grouped as follows:
Chapter 1: Cleaning for FEOL Applications,
Chapter 2: Cleaning for FEOL Applications: Beyond-Si Active Area,
Chapter 3: Wet Etching for FEOL Applications,
Chapter 4: Wet Processing of High Aspect Ratio Structures,
Chapter 5: Fluid Dynamics, Cleaning Mechanics,
Chapter 6: Photo Resist Performance and Rework,
Chapter 7: Cleaning for BEOL Interconnect Applications,
Chapter 8: Cleaning for 3D Applications,
Chapter 9: Contamination Control and AMC,
Chapter 10: Cleaning and Wet Etching for Semiconductor Photo-Voltaic Cells

Les informations fournies dans la section « Synopsis » peuvent faire référence à une autre édition de ce titre.

Éditeur
Trans Tech Publications Ltd
Date d'édition
2014
Langue
anglais
ISBN 10 
303835242X
ISBN 13 
9783038352426
Reliure
Broché
Nombre de pages
350
Éditeur
Mertens Paul, Meuris Marc, Heyns Marc
Coordonnées du fabricant
non disponible
Personne responsable
non disponible