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Simulation of Semiconductor Processes and Devices 2001: Sispad 2001 - Couverture rigide

 
9783211837085: Simulation of Semiconductor Processes and Devices 2001: Sispad 2001
Couverture rigide
ISBN 10 : 3211837086 ISBN 13 : 9783211837085
Editeur : Springer Verlag GmbH, 2001

Synopsis

This volume contains the Proceedings of the International Conference on Simulation of Semiconductor Devices and Processes, SISPAD 01, held on September 5-7, 2001, in Athens. The conference provided an open forum for the presentation of the latest results and trends in process and device simulation. The trend towards shrinking device dimensions and increasing complexity in process technology demands the continuous development of advanced models describing basic physical phenomena involved. New simulation tools are developed to complete the hierarchy in the Technology Computer Aided Design simulation chain between microscopic and macroscopic approaches. The conference program featured 8 invited papers, 60 papers for oral presentation and 34 papers for poster presentation, selected from a total of 165 abstracts from 30 countries around the world. These papers disclose new and interesting concepts for simulating processes and devices.

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Éditeur
Springer Verlag GmbH
Date d'édition
2001
Langue
anglais
ISBN 10 
3211837086
ISBN 13 
9783211837085
Reliure
Relié
Nombre de pages
470
Éditeur
Tsoukalas Dimitris, Tsamis Christos
Coordonnées du fabricant
non disponible
Personne responsable
CMN Printpool Inh. Mathis Neumann
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