Articles liés à Nanopositioning Technologies: Fundamentals and Applications

Nanopositioning Technologies: Fundamentals and Applications - Couverture souple

 
9783319795393: Nanopositioning Technologies: Fundamentals and Applications

Synopsis

This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries.

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À propos de la quatrième de couverture

This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies, and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries.

Les informations fournies dans la section « A propos du livre » peuvent faire référence à une autre édition de ce titre.