Processing of Semiconductors - Couverture souple

 
9783527268290: Processing of Semiconductors

Synopsis

This volume is part of a series devoted to the growing interdisciplinary field of materials science and technology. A compendium of current state-of-the-art information, the series covers the most important classes of materials: metals; ceramics; glasses; polymers; semiconductors; and composites. Each volume deals with properties, processing, applications or general phenomena associated with these materials. This volume deals with the processing of semiconductors.

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Présentation de l'éditeur

This self–contained handbook deals with the enabling materials technology for the electronics industry. World renowned authors have contributed to this unique treatment of the processing of semiconductors and related technologies.

Contents: Wilkes: Silicon Processing. Mullin: Compound Semiconductor Processing, Kuech/BleLagally/Tischler: Epitaxial Growth. Leuschner/Pawlowski: Photolithography. Griffin: Doping. Turner/Donohoe: Etching Processes in Semiconductor Manufacturing. Chang/Sze: Silicon Device Structures. Lam/Stanchina: Compound Semiconductor Device Structures. Kwong: Silicon Device Processing. Parsey, Jr: Compound Semiconductor Device Processing. Amey: Chip Carriers. Knausenberger/Turlik: Interconnection Systems.

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