Cvd of Compound Semiconductors: Precursor Synthesis, Development and Applications - Couverture rigide

O'Brien, P.; Jones, A.C.

Couverture rigide

ISBN 10 : 3527292942 ISBN 13 : 9783527292943

Editeur : Wiley-VCH Verlag GmbH, 1997

Synopsis

Chemical growth methods of electronic materials are the keystone of microelectronic device processing. This text details the deposition methods available for different materials aiming to make the chemistry of deposition accessible to the materials scientist.

A propos du livre

Présentation de l'éditeur

Chemical growth methods of electronic materials are the keystone of microelectronic device processing. This book discusses the applications of metalorganic chemistry for the vapor phase deposition of compound semiconductors. Vapor phase methods used for semiconductor deposition and the materials properties that make the organometallic precursors useful in the electronics industry are discussed for a variety of materials.

Topics included:

∗ techniques for compound semiconductor growth
∗ metalorganic precursors for III–V MOVPE
∗ metalorganic precursors for II–VI MOVPE
∗ single–source precursors
∗ chemical beam epitaxy
∗ atomic layer epitaxy

Several useful appendixes and a critically selected, up–to–date list of references round off this practical handbook for materials scientists, solid–state and organometallic chemists, and engineers.

Détails de l'édition

• Éditeur: Wiley-VCH Verlag GmbH
• Date d'édition: 1997
• Langue: anglais
• ISBN 10: 3527292942
• ISBN 13: 9783527292943
• Reliure: Relié
• Nombre de pages: 352
• Coordonnées du fabricant: non disponible
• Personne responsable: non disponible