Articles liés à Wafer Bonding: Applications and Technology

Wafer Bonding: Applications and Technology - Couverture rigide

Livre 57 sur 233: Springer Series in Materials Science
 
9783540210498: Wafer Bonding: Applications and Technology

Synopsis

The topics include bonding-based fabrication methods of silicon-on-insulator, photonic crystals, VCSELs, SiGe-based FETs, MEMS together with hybrid integration and laser lift-off. The non-specialist will learn about the basics of wafer bonding and its various application areas, while the researcher in the field will find up-to-date information about this fast-moving area, including relevant patent information.

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