Low-Energy Ion Irradiation of Solid Surfaces - Couverture rigide

Gnaser, H.

Couverture rigide

ISBN 10 : 3540650075 ISBN 13 : 9783540650072

Editeur : Springer-Verlag Berlin and Heidelberg GmbH & Co. K, 1998

Synopsis

This work presents an overview on important aspects of ion irradiation of surfaces, emphasizing low impact energies. Specifically, ion penetration and implantation into solids, defect creation and amorphization of semiconductors, sputtering of elemental and multicomponent targets, and ionization processes of emitted species are discussed. It provides a synoptic view of these phenomena which are strongly interrelated by the same basic processes, but are often described separately and in diverging terminology. The book tries to bridge this gap, summarizing results from experiments, computer simulations and theoretical approaches.

Détails de l'édition

• Éditeur: Springer-Verlag Berlin and Heidelberg GmbH & Co. K
• Date d'édition: 1998
• Langue: anglais
• ISBN 10: 3540650075
• ISBN 13: 9783540650072
• Reliure: Relié
• Nombre de pages: 302
• Coordonnées du fabricant: non disponible
• Personne responsable: CMN Printpool Inh. Mathis Neumann; https://www.also.com/ec/cms5/en_6000/6000/index.jsp; ; Friedrich-Karl-Str. 9; Hamburg; Allemagne