Precision Control of Planar Motion Stages: Design and Implementation of Precision Motion Control Strategies - Couverture souple

Gao, Wei; Dian, Songyi

 
9783639220377: Precision Control of Planar Motion Stages: Design and Implementation of Precision Motion Control Strategies
Couverture souple
ISBN 10 : 3639220374 ISBN 13 : 9783639220377
Editeur : VDM Verlag Dr. Müller, 2010

Synopsis

Planar motion stages actuated by planar motors, which can generate XY in-plane motions, have the advantages of direct drive, high speed, non-contact levitation and simple structure. Such kinds of stages, however, are sensitive to interferences between axes, modeling uncertainties and disturbances because there are no mechanical restrictions in the XY plane. Conventional stage controllers based on classical control methods cannot achieve satisfied positioning performance for the stage. This book presents the design and implementation of precision motion control strategies for the planar motion stages. For ultraprecision positioning applications, dynamics modeling, decoupled control, sliding mode observer- based compensation and performance evaluation for the surface motor-driven planar motion stage are presented. For precision positioning applications, dynamic modeling, sliding mode observer-based control and hybrid sensorless control for the Sawyer motor-based planar motion stage are discussed. The authors believe this book can be a useful reference on precision motion control of planar motion stages or other types of precision positioning systems.

Les informations fournies dans la section « Synopsis » peuvent faire référence à une autre édition de ce titre.

Présentation de l'éditeur

Planar motion stages actuated by planar motors, which can generate XY in-plane motions, have the advantages of direct drive, high speed, non-contact levitation and simple structure. Such kinds of stages, however, are sensitive to interferences between axes, modeling uncertainties and disturbances because there are no mechanical restrictions in the XY plane. Conventional stage controllers based on classical control methods cannot achieve satisfied positioning performance for the stage. This book presents the design and implementation of precision motion control strategies for the planar motion stages. For ultraprecision positioning applications, dynamics modeling, decoupled control, sliding mode observer- based compensation and performance evaluation for the surface motor-driven planar motion stage are presented. For precision positioning applications, dynamic modeling, sliding mode observer-based control and hybrid sensorless control for the Sawyer motor-based planar motion stage are discussed. The authors believe this book can be a useful reference on precision motion control of planar motion stages or other types of precision positioning systems.

Les informations fournies dans la section « A propos du livre » peuvent faire référence à une autre édition de ce titre.

Éditeur
VDM Verlag Dr. Müller
Date d'édition
2010
Langue
anglais
ISBN 10 
3639220374
ISBN 13 
9783639220377
Reliure
Broché
Nombre de pages
160
Coordonnées du fabricant
non disponible
Personne responsable
non disponible