Epitaxy: Physical Principles and Technical Implementation - Couverture souple

Herman, Marian A. A.; Richter, W.; Sitter, Helmut

Couverture souple

ISBN 10 : 364208737X ISBN 13 : 9783642087370

Editeur : Springer, 2010

Synopsis

This book is written in a uniform and comprehensive style. It provides the readers with fundamental and up-dated knowledge on all aspects important of epitaxy and epitaxial growth techniques. It is easy to read by both newcomers in the field as well as the experienced specialists in this film technology and characterization.

A propos du livre

Présentation de l'éditeur

In a uniform and comprehensive manner the authors describe all the important aspects of the epitaxial growth processes of solid films on crystalline substrates, e.g. processes in which atoms of the growing film mimic the arrangement of the atoms of the substrate. Emphasis is put on sufficiently fundamental and unequivocal presentation of the subject in the form of an easy-to-read review. A large part of this book focuses on the problems of heteroepitaxy. The most important epitaxial growth techniques which are currently widely used in basic research as well as in manufacturing processes of devices are presented and discussed in detail.

Détails de l'édition

• Éditeur: Springer
• Date d'édition: 2010
• Langue: anglais
• ISBN 10: 364208737X
• ISBN 13: 9783642087370
• Reliure: Broché
• Nombre de pages: 544
• Coordonnées du fabricant: non disponible
• Personne responsable: non disponible