Design and Manufacturing of Active Microsystems - Couverture souple

Couverture souple

ISBN 10 : 3642267386 ISBN 13 : 9783642267383

Editeur : Springer, 2014

Synopsis

This book presents the design and manufacturing of microsystems as well as necessary key technologies developed within the Collaborative Research Center 516. The research efforts of this collaboration are focused on active micro systems which are based on the electromagnetic actuator principle. The travel of the investigated actuator systems is on the order of several millimeters. The total construction size of the actuator is on the range of several centimeters whereas essential structures being several micrometers. The methods and the production technologies that are investigated on the basis of various research models incorporate the fundamental process chains of microsystems.

A propos du livre

Présentation de l'éditeur

This book presents the design and manufacturing of microsystems as well as necessary key technologies developed within the Collaborative Research Center 516 where the focus is on active micro systems based on the electromagnetic actuator principle.

Détails de l'édition

• Éditeur: Springer
• Date d'édition: 2014
• Langue: anglais
• ISBN 10: 3642267386
• ISBN 13: 9783642267383
• Reliure: Broché
• Nombre de pages: 456
• Éditeur: Büttgenbach Stephanus, Burisch Arne, Hesselbach Jürgen
• Coordonnées du fabricant: ProductSafety@springernature.com; ProductSafety@springernature.com; ; Poststr. 9; Darmstadt; 64293; Allemagne