An Introduction to MEMS Technology: Design & Analysis of MEMS Based Microheater Array on SOI Wafer for Low Power Gas Sensor Applications - Couverture souple

Datta Gupta, Avigyan; Roy Chowdhury, Chirashree

 
9783659247002: An Introduction to MEMS Technology: Design & Analysis of MEMS Based Microheater Array on SOI Wafer for Low Power Gas Sensor Applications
Couverture souple
ISBN 10 : 3659247006 ISBN 13 : 9783659247002
Editeur : LAP LAMBERT Academic Publishing, 2012

Synopsis

Microelectromechanical systems(MEMS)are small integrated devices or systems that combine electrical and mechanical components. They range in size from the sub micrometer (or sub micron) level to the millimeter level, and there can be any number, from a few to millions, in a particular system. MEMS extend the fabrication techniques developed for the integrated circuit industry to add mechanical elements such as beams, gears, diaphragms, and springs to devices.These systems can sense, control, and activate mechanical processes on the micro scale, and function individually or in arrays to generate effects on the macro scale.In this book a detailed description of the design and analysis of MEMS based microheater array on SOI wafer for gas sensor application is proposed.MEMS based array of microheaters of SOI wafer have an added advantage which increases the efficiency of the microheater i.e less power is required to reach high temperature and also the thermal loss is minimized.They are usually produced using a standard CMOS process, have the additional advantages of being readily realized by commercial foundries and amenable to the inculsion of on-chip electronics.

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Présentation de l'éditeur

Microelectromechanical systems(MEMS)are small integrated devices or systems that combine electrical and mechanical components. They range in size from the sub micrometer (or sub micron) level to the millimeter level, and there can be any number, from a few to millions, in a particular system. MEMS extend the fabrication techniques developed for the integrated circuit industry to add mechanical elements such as beams, gears, diaphragms, and springs to devices.These systems can sense, control, and activate mechanical processes on the micro scale, and function individually or in arrays to generate effects on the macro scale.In this book a detailed description of the design and analysis of MEMS based microheater array on SOI wafer for gas sensor application is proposed.MEMS based array of microheaters of SOI wafer have an added advantage which increases the efficiency of the microheater i.e less power is required to reach high temperature and also the thermal loss is minimized.They are usually produced using a standard CMOS process, have the additional advantages of being readily realized by commercial foundries and amenable to the inculsion of on-chip electronics.

Biographie de l'auteur

Avigyan Datta Gupta was born in Kolkata, WestBengal, India on 16thAugust, 1986.He received the B.Tech degree in Electronics & Instrumentation Engineering in 2011.He is involved in several projects & workshops in Jadavpur University,IIT Kharagpur and Bengal Engineering & Science University.His area of interest in Analog/Mixed Signal VLSI and MEMS.

Les informations fournies dans la section « A propos du livre » peuvent faire référence à une autre édition de ce titre.

Éditeur
LAP LAMBERT Academic Publishing
Date d'édition
2012
Langue
anglais
ISBN 10 
3659247006
ISBN 13 
9783659247002
Reliure
Broché
Nombre de pages
100
Coordonnées du fabricant
non disponible
Personne responsable
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