Nanofabrication: Techniques and Principles - Couverture rigide

Couverture rigide

ISBN 10 : 3709104238 ISBN 13 : 9783709104231

Editeur : Springer Verlag GmbH, 2011

Synopsis

Intended to update scientists and engineers on the current state of the art in a variety of key techniques used extensively in the fabrication of structures at the nanoscale. The present work covers the essential technologies for creating sub 25 nm features lithographically, depositing layers with nanometer control, and etching patterns and structures at the nanoscale. A distinguishing feature of this book is a focus not on extension of microelectronics fabrication, but rather on techniques applicable for building NEMS, biosensors, nanomaterials, photonic crystals, and other novel devices and structures that will revolutionize society in the coming years.

A propos du livre

À propos de la quatrième de couverture

Intended to update scientists and engineers on the current state of the art in a variety of key techniques used extensively in the fabrication of structures at the nanoscale. The present work covers the essential technologies for creating sub 25 nm features lithographically, depositing layers with nanometer control, and etching patterns and structures at the nanoscale. A distinguishing feature of this book is a focus not on extension of microelectronics fabrication, but rather on techniques applicable for building NEMS, biosensors, nanomaterials, photonic crystals, and other novel devices and structures that will revolutionize society in the coming years.

Détails de l'édition

• Éditeur: Springer Verlag GmbH
• Date d'édition: 2011
• Langue: anglais
• ISBN 10: 3709104238
• ISBN 13: 9783709104231
• Reliure: Relié
• Nombre de pages: 344
• Éditeur: Stepanova Maria, Dew Steven
• Coordonnées du fabricant: Springer Nature Customer Service Center GmbH; ProductSafety@springernature.com; ; Europaplatz 3; Heidelberg; 69115; Allemagne