Nanofabrication: Techniques and Principles - Couverture souple

Couverture souple

ISBN 10 : 370911666X ISBN 13 : 9783709116661

Editeur : Springer, 2014

Synopsis

Intended to update scientists and engineers on the current state of the art in a variety of key techniques used extensively in the fabrication of structures at the nanoscale. The present work covers the essential technologies for creating sub 25 nm features lithographically, depositing layers with nanometer control, and etching patterns and structures at the nanoscale. A distinguishing feature of this book is a focus not on extension of microelectronics fabrication, but rather on techniques applicable for building NEMS, biosensors, nanomaterials, photonic crystals, and other novel devices and structures that will revolutionize society in the coming years.

A propos du livre

Présentation de l'éditeur

This volume updates scientists and engineers on the state of the art in various key techniques used to fabricate nanoscale structures. As well as covering lithographic creation of nano features, it focuses on new and revolutionary devices such as biosensors.

Détails de l'édition

• Éditeur: Springer
• Date d'édition: 2014
• Langue: anglais
• ISBN 10: 370911666X
• ISBN 13: 9783709116661
• Reliure: Broché
• Nombre de pages: 352
• Éditeur: Stepanova Maria, Dew Steven
• Coordonnées du fabricant: Springer Nature Customer Service Center GmbH; ProductSafety@springernature.com; ; Europaplatz 3; Heidelberg; 69115; Allemagne