MEMS/NEMS Devices and Applications, 2nd Edition - Couverture rigide

Couverture rigide

ISBN 10 : 3725880832 ISBN 13 : 9783725880836

Editeur : Mdpi AG, 2026

Synopsis

This Reprint presents recent advances in nanoelectromechanical system (NEMS)- and microelectromechanical system (MEMS)-based devices and their applications. The collected articles cover the design, fabrication, characterization, and application of various MEMS/NEMS-based devices, including physical sensors, chemical sensors, biosensors, gas sensors, optical sensors, flow sensors, actuators, resonators, switches, micromirrors, and energy harvesters. The contributions highlight the rapid development of MEMS/NEMS technologies for miniaturized, high-performance, and low-power microsystems. The published works also demonstrate the integration of advanced materials, microfabrication techniques, and CMOS-compatible processes for emerging sensing and actuator applications. This Reprint provides researchers, engineers, and graduate students with an overview of the current trends and future directions in MEMS/NEMS technologies and their multidisciplinary applications.

Détails de l'édition

• Éditeur: Mdpi AG
• Date d'édition: 2026
• Langue: anglais
• ISBN 10: 3725880832
• ISBN 13: 9783725880836
• Reliure: Hardcover
• Nombre de pages: 196
• Éditeur: Dai Ching-Liang, Tsai Yao-Chuan, Dai Zhi-Xuan
• Coordonnées du fabricant: non disponible
• Personne responsable: non disponible