High Speed End Milling of Single Crystal Silicon Wafer: An Economic Method of Machining of Silicon in Ductile Mode - Couverture souple

Amin, A.K.M. Nurul; Dali Bin Mohd Ismail, Mohd; Iqbal Bin Musa, Muhammad

 
9783844381115: High Speed End Milling of Single Crystal Silicon Wafer: An Economic Method of Machining of Silicon in Ductile Mode
Couverture souple
ISBN 10 : 3844381112 ISBN 13 : 9783844381115
Editeur : LAP LAMBERT Academic Publishing, 2011

Synopsis

Machining of single crystal silicon is a challenging and expensive affair due to the high hardness and inherent brittleness of the material. Major problem in conventional machining of brittle materials like silicon is the generation of cracks and subsurface damages. This book outlines a ductile mode machining process developed for silicon employing high speed end milling using diamond coated tools. The developed method was found to ensure integrity of the machined surface and good surface finish. The influence of the cutting parameters, such as, cutting speed, feed and depth of cut, on ductile mode machining are discussed in the book. A 3-level full factorial design of experiments using Response Surface Methodology (RSM) was employed to develop regression model of average surface roughness. The developed model was tested using Analysis of Variance (ANOVA) at 95% confidence level. The best average surface roughness achieved was 0.2μm, which could alleviate the need for further grinding and rough polishing operations to save cost and cycle time of machining silicon.

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Présentation de l'éditeur

Machining of single crystal silicon is a challenging and expensive affair due to the high hardness and inherent brittleness of the material. Major problem in conventional machining of brittle materials like silicon is the generation of cracks and subsurface damages. This book outlines a ductile mode machining process developed for silicon employing high speed end milling using diamond coated tools. The developed method was found to ensure integrity of the machined surface and good surface finish. The influence of the cutting parameters, such as, cutting speed, feed and depth of cut, on ductile mode machining are discussed in the book. A 3-level full factorial design of experiments using Response Surface Methodology (RSM) was employed to develop regression model of average surface roughness. The developed model was tested using Analysis of Variance (ANOVA) at 95% confidence level. The best average surface roughness achieved was 0.2μm, which could alleviate the need for further grinding and rough polishing operations to save cost and cycle time of machining silicon.

Biographie de l'auteur

A.K.M. Nurul Amin, Mohd Dali Bin Mohd Ismail and Muhammad Iqbal Bin MusaDr. Amin is a Senior Professor at the International Islamic University Malaysia (IIUM). His research areas include chatter/vibration in machining, hot machining and high speed machining of metals, alloys and ceramics, Mr. Dali is doing his Master in Australia and Mr. Iqbal is working at Malaysian Company after completing their UG studies at IIUM.

Les informations fournies dans la section « A propos du livre » peuvent faire référence à une autre édition de ce titre.

Éditeur
LAP LAMBERT Academic Publishing
Date d'édition
2011
Langue
anglais
ISBN 10 
3844381112
ISBN 13 
9783844381115
Reliure
Broché
Nombre de pages
96
Coordonnées du fabricant
non disponible
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