An Electrostatically Actuated Membrane Microvalve: With a View to its Design, Simulation, Fabrication, and Characterization - Couverture souple

Çubukçu, Ali Şükrü

 
9783847330097: An Electrostatically Actuated Membrane Microvalve: With a View to its Design, Simulation, Fabrication, and Characterization
Couverture souple
ISBN 10 : 3847330098 ISBN 13 : 9783847330097
Editeur : LAP LAMBERT Academic Publishing, 2012

Synopsis

This book presents an electrostatically actuated, normally open, low pressure-drop silicon membrane microvalve. It is intended to be used in an ion mobility spectrometer in order to enhance its operating range. The fabricated microvalve shows expected characteristics except hysteresis behavior and its quality of repeatability, which are discussed in the book reasoning them by parasitic charges in the silicon dioxide and built-in oxide voltage. Pull-in and relaxation characteristics of the diaphragm are also discussed extensively. Nitrogen flow rate is 30.05 sccm at 50 mbar pressure drop. Experiments show 0.0139 sccm leakage rate for an initial flow of 5 sccm which corresponds to a characteristic ratio of 359.7 using 200 V. This can be improved to 1798.6 using 300 V. This work is also an example to microsystem and microvalve design, guiding the reader from design to characterization following each step, and providing details such as governing equations, simulation codes in ANSYS, lithography masks, and fabrication steps. Thus, it will hopefully be beneficial for beginners in MEMS with its simple language as well as for intermediate level designers seeking detailed information.

Les informations fournies dans la section « Synopsis » peuvent faire référence à une autre édition de ce titre.

Présentation de l'éditeur

This book presents an electrostatically actuated, normally open, low pressure-drop silicon membrane microvalve. It is intended to be used in an ion mobility spectrometer in order to enhance its operating range. The fabricated microvalve shows expected characteristics except hysteresis behavior and its quality of repeatability, which are discussed in the book reasoning them by parasitic charges in the silicon dioxide and built-in oxide voltage. Pull-in and relaxation characteristics of the diaphragm are also discussed extensively. Nitrogen flow rate is 30.05 sccm at 50 mbar pressure drop. Experiments show 0.0139 sccm leakage rate for an initial flow of 5 sccm which corresponds to a characteristic ratio of 359.7 using 200 V. This can be improved to 1798.6 using 300 V. This work is also an example to microsystem and microvalve design, guiding the reader from design to characterization following each step, and providing details such as governing equations, simulation codes in ANSYS, lithography masks, and fabrication steps. Thus, it will hopefully be beneficial for beginners in MEMS with its simple language as well as for intermediate level designers seeking detailed information.

Biographie de l'auteur

Ali S. Cubukcu received the BSc degree in electrical and electronics engineering from METU and the MSc degree in microelectronics and microsystems engineering from TUHH in 2003 and 2006, respectively. He is currently a PhD student within IMTEK at University of Freiburg. His research interests include microvalves and thermal flow sensors.

Les informations fournies dans la section « A propos du livre » peuvent faire référence à une autre édition de ce titre.

Éditeur
LAP LAMBERT Academic Publishing
Date d'édition
2012
Langue
anglais
ISBN 10 
3847330098
ISBN 13 
9783847330097
Reliure
Broché
Nombre de pages
116
Coordonnées du fabricant
non disponible
Personne responsable
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