Ultra Clean Processing of Silicon Surfaces 2000 - Couverture souple

Couverture souple

ISBN 10 : 3908450578 ISBN 13 : 9783908450573

Editeur : Trans Tech Publications Ltd, 2001

Synopsis

Volume is indexed by Thomson Reuters CPCI-S (WoS).
The proceedings of the Fifth International Symposium on Ultra Clean Processing of Silicon Surfaces cover all aspects of ultra-clean Si-technology: cleaning, contamination control, Si-surface chemistry and topography, and its relationship to device performance and process yield. New areas of concern include: cleaning at the interconnect level, resist strip and polymer removal (dry and wet), cleaning and contamination aspects of metallization, wafer backside cleaning and cleaning after Chemical-Mechanical-Polishing (CMP).

Détails de l'édition

• Éditeur: Trans Tech Publications Ltd
• Date d'édition: 2001
• Langue: anglais
• ISBN 10: 3908450578
• ISBN 13: 9783908450573
• Reliure: Broché
• Nombre de pages: 340
• Éditeur: Heyns Marc, Meuris Marc, Mertens Paul
• Coordonnées du fabricant: non disponible
• Personne responsable: non disponible