Ultra Clean Processing of Semiconductor Surfaces IX: Ucpss 2008, 9th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (Ucpss) Held in Bruges, Belgium, September 22-24, 2008 - Couverture souple

 
9783908451648: Ultra Clean Processing of Semiconductor Surfaces IX: Ucpss 2008, 9th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (Ucpss) Held in Bruges, Belgium, September 22-24, 2008
Couverture souple
ISBN 10 : 3908451647 ISBN 13 : 9783908451648
Editeur : Trans Tech Publications Ltd, 2009

Synopsis

Volume is indexed by Thomson Reuters CPCI-S (WoS).
The contents of this publication include every conceivable issue related to contamination, cleaning and surface preparation during mainstream large-scale integrated circuit manufacture. Typically, silicon is used as the main semiconductor substrate. However, other semiconducting materials such as SiGe and SiC are currently being used in the source-sink junction areas, and materials such as Ge and III-V compounds are being considered for the transistor channel region of future-generation devices.

Les informations fournies dans la section « Synopsis » peuvent faire référence à une autre édition de ce titre.

Éditeur
Trans Tech Publications Ltd
Date d'édition
2009
Langue
anglais
ISBN 10 
3908451647
ISBN 13 
9783908451648
Reliure
Broché
Nombre de pages
412
Éditeur
Mertens Paul, Meuris Marc, Heyns Marc
Coordonnées du fabricant
non disponible
Personne responsable
non disponible