Crucial Issues in Semiconductor Materials and Processing Technologies: (Closed)) - Couverture souple

 
9789401052030: Crucial Issues in Semiconductor Materials and Processing Technologies: (Closed))
Couverture souple
ISBN 10 : 9401052034 ISBN 13 : 9789401052030
Editeur : Springer, 2012

Synopsis

Semiconductors lie at the heart of some of the most important industries and technologies of the twentieth century. The complexity of silicon integrated circuits is increasing considerably because of the continuous dimensional shrinkage to improve efficiency and functionality. This evolution in design rules poses real challenges for the materials scientists and processing engineers. Materials, defects and processing now have to be understood in their totality. World experts discuss, in this volume, the crucial issues facing lithography, ion implication and plasma processing, metallization and insulating layer quality, and crystal growth. Particular emphasis is placed upon silicon, but compound semiconductors and photonic materials are also highlighted. The fundamental concepts of phase stability, interfaces and defects play a key role in understanding these crucial issues. These concepts are reviewed in a crucial fashion.

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Éditeur
Springer
Date d'édition
2012
Langue
anglais
ISBN 10 
9401052034
ISBN 13 
9789401052030
Reliure
Broché
Nombre de pages
564
Éditeur
Coffa S., Priolo F., Rimini Emanuele, Poate J.M.
Coordonnées du fabricant
non disponible
Personne responsable
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9780792320036: Crucial Issues in Semiconductor Materials and Processing Technologies: NATO Asi : Series E : Applied Sciences, Vol. 222

Edition présentée

ISBN 10 :  0792320034 ISBN 13 :  9780792320036
Editeur : Kluwer Academic Publishers, 1992
Couverture rigide