Non-Classical Crystallization of Thin Films and Nanostructures in CVD and PVD Processes - Couverture souple
Livre 19 sur 30: Springer Series in Surface Sciences
Synopsis
1 Non-Classical Crystallization.- 2 Thermodynamics of Physical and Chemical Vapour Deposition.- 3 Nucleation.- 4 Growth.- 5 Diamond Synthesis at Low Pressure.- 6 Growth Mechanism of CVD Diamond.- 7 Growth Mechanism of CVD Silicon.- 8 Other Works Related to Non-Classical Crystallization of Thin Films and Nanostructures.- 9 Experimental Confirmation of Charged Nanoparticles during Atmospheric CVD Using Differential Mobility Analyser.- 10 Experimental Confirmation of Charged Nanoparticles at Low Pressure.- 11 Deposition Behavior of Charged Nanoparticles.- 12 Bias Effect on Deposition Behaviour of Charged Nanoparticles.- 13 Charge-Enhanced Kinetics.- 14 Implications and Applications.
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