Articles liés à Micro Electronic and Mechanical Systems

Micro Electronic and Mechanical Systems - Couverture rigide

 
9789533070278: Micro Electronic and Mechanical Systems
Couverture rigide
ISBN 10 : 9533070277 ISBN 13 : 9789533070278
Editeur : In Tech, 2009

Synopsis

This book discusses key aspects of MEMS technology areas, organized in twenty-seven chapters that present the latest research developments in micro electronic and mechanical systems. The book addresses a wide range of fundamental and practical issues related to MEMS, advanced metal-oxide-semiconductor (MOS) and complementary MOS (CMOS) devices, SoC technology, integrated circuit testing and verification, and other important topics in the field. ?Several chapters cover state-of-the-art microfabrication techniques and materials as enabling technologies for the microsystems. Reliability issues concerning both electronic and mechanical aspects of these devices and systems are also addressed in various chapters.

Les informations fournies dans la section « Synopsis » peuvent faire référence à une autre édition de ce titre.

Éditeur
In Tech
Date d'édition
2009
Langue
anglais
ISBN 10 
9533070277
ISBN 13 
9789533070278
Reliure
Relié
Nombre de pages
528
Éditeur
Takahata Kenichi
Coordonnées du fabricant
IN TECH d.o.o.
info@intechopen.com

Prolaz Marije Krucifikse Kozuli¿ 3
Rijeka
51000
Croatie