Lithography - Couverture rigide

Couverture rigide

ISBN 10 : 9533070641 ISBN 13 : 9789533070643

Editeur : In Tech, 2010

Synopsis

Lithography, the fundamental fabrication process of semiconductor devices, plays a critical role in micro- and nano-fabrications and the revolution in high density integrated circuits. This book is the result of inspirations and contributions from many researchers worldwide. Although the inclusion of the book chapters may not be a complete representation of all lithographic arts, it does represent a good collection of contributions in this field. We hope readers will enjoy reading the book as much as we have enjoyed bringing it together. We would like to thank all contributors and authors of this book.

Détails de l'édition

• Éditeur: In Tech
• Date d'édition: 2010
• Langue: anglais
• ISBN 10: 9533070641
• ISBN 13: 9789533070643
• Reliure: Relié
• Nombre de pages: 680
• Éditeur: Wang Michael
• Coordonnées du fabricant: IN TECH d.o.o.; info@intechopen.com; ; Prolaz Marije Krucifikse Kozuli¿ 3; Rijeka; 51000; Croatie