Advances in Micro/Nano Electromechanical Systems and Fabrication Technologies - Couverture rigide

Couverture rigide

ISBN 10 : 9535110853 ISBN 13 : 9789535110859

Editeur : In Tech, 2013

Synopsis

MEMS technology is increasingly penetrating into our lives and improving our quality of life. In parallel to this, advances in nanotechnology and nanomaterials have been catalyzing the rise of NEMS. Consisting of nine chapters reviewing state-of-the-art technologies and their future trends, this book focuses on the latest development of devices and fabrication processes in the field of these extremely miniaturized electromechanical systems. The book offers new knowledge and insight into design, fabrication, and packaging, as well as solutions in these aspects for targeted applications, aiming to support scientists, engineers and academic trainees who are engaged in relevant research. In the chapters, practical issues and advances are discussed for flexible microdevices, bioMEMS, intelligent implants, optical MEMS, nanomachined structures and NEMS, and others. Most of the chapters also focus on novel fabrication/packaging processes, including silicon bulk micromachining, laser micromachining, nanolithography, and packaging for implantable microelectronics enabled by nanomaterials.

Détails de l'édition

• Éditeur: In Tech
• Date d'édition: 2013
• Langue: anglais
• ISBN 10: 9535110853
• ISBN 13: 9789535110859
• Reliure: Relié
• Nombre de pages: 236
• Éditeur: Takahata Kenichi
• Coordonnées du fabricant: non disponible
• Personne responsable: non disponible