Laser Heat-mode Lithography: Principle and Methods - Couverture rigide

Livre 203 sur 233: Springer Series in Materials Science

Wei, Jingsong

9789811509421: Laser Heat-mode Lithography: Principle and Methods

Couverture rigide

ISBN 10 : 9811509425 ISBN 13 : 9789811509421

Editeur : Springer Verlag, Singapore, 2019

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This book provides a systematic description and analysis of laser heat-mode lithography, addressing the basic principles, lithography system, manipulation of feature size, grayscale lithography, resist thin films, and pattern transfer, while also presenting typical experimental results and applications. It introduces laser heat-mode lithography, where the resist thin films are essentially an opto-thermal response to the laser beam with changeable wavelength and are not sensitive to laser wavelength. Laser heat-mode lithography techniques greatly simplify production procedures because they require neither a particular light source nor a particular environment; further, there are no pre-baking and post-baking steps required for organic photoresists. The pattern feature size can be either larger or smaller than the laser spot by adjusting the writing strategy. The lithographic feature size can also be arbitrarily tuned from nanoscale to micrometer without changing the laser spot size.Lastly, the line edge roughness can be controlled at a very low value because the etching process is a process of breaking bonds among atoms. The book offers an invaluable reference guide for all advanced undergraduates, graduate students, researchers and engineers working in the fields of nanofabrication, lithography techniques and systems, phase change materials, etc.

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� propos de l?auteur

Jingsong Wei received the Ph.D. degree in Chinese Academy of Sciences. He is currently a Professor with Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences. He has published more than 120 articles in professional journals including Applied Physics Letters, Optics Express, Optics Letters, etc. His research interests include miro/nanolithography, super-resolution optics, and optical instruments.

Les informations fournies dans la section � A propos du livre � peuvent faire r�f�rence � une autre �dition de ce titre.

�diteur: Springer Verlag, Singapore
Date d'�dition: 2019
Langue: anglais
ISBN 10: 9811509425
ISBN 13: 9789811509421
Reliure: Reli�
Nombre de pages: 221
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Laser Heat-Mode Lithography (Hardcover)

Jingsong Wei

Edit� par Springer Verlag, Singapore, Singapore, 2019

ISBN 10 : 9811509425 ISBN 13 : 9789811509421

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Hardcover. Etat : new. Hardcover. This book provides a systematic description and analysis of laser heat-mode lithography, addressing the basic principles, lithography system, manipulation of feature size, grayscale lithography, resist thin films, and pattern transfer, while also presenting typical experimental results and applications. It introduces laser heat-mode lithography, where the resist thin films are essentially an opto-thermal response to the laser beam with changeable wavelength and are not sensitive to laser wavelength. Laser heat-mode lithography techniques greatly simplify production procedures because they require neither a particular light source nor a particular environment; further, there are no pre-baking and post-baking steps required for organic photoresists. The pattern feature size can be either larger or smaller than the laser spot by adjusting the writing strategy. The lithographic feature size can also be arbitrarily tuned from nanoscale to micrometer without changing the laser spot size.Lastly, the line edge roughness can be controlled at a very low value because the etching process is a process of breaking bonds among atoms. The book offers an invaluable reference guide for all advanced undergraduates, graduate students, researchers and engineers working in the fields of nanofabrication, lithography techniques and systems, phase change materials, etc. This book provides a systematic description and analysis of laser heat-mode lithography, addressing the basic principles, lithography system, manipulation of feature size, grayscale lithography, resist thin films, and pattern transfer, while also presenting typical experimental results and applications. Shipping may be from multiple locations in the US or from the UK, depending on stock availability. N� de r�f. du vendeur 9789811509421

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Laser Heat-Mode Lithography: Principle and Methods (Springer Series in Materials Science)

Wei, Jingsong

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ISBN 10 : 9811509425 ISBN 13 : 9789811509421

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Hardcover. Etat : Brand New. 221 pages. 9.25x6.10x0.67 inches. In Stock. This item is printed on demand. N� de r�f. du vendeur __9811509425

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Laser Heat-Mode Lithography: Principle and Methods (Springer Series in Materials Science, 291)

Wei, Jingsong

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Laser Heat-Mode Lithography

Jingsong Wei

Edit� par Springer Nature Singapore Nov 2019, 2019

ISBN 10 : 9811509425 ISBN 13 : 9789811509421

Neuf Couverture rigide

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Vendeur : BuchWeltWeit Ludwig Meier e.K., Bergisch Gladbach, Allemagne

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Buch. Etat : Neu. This item is printed on demand - it takes 3-4 days longer - Neuware -This book provides a systematic description and analysis of laser heat-mode lithography, addressing the basic principles, lithography system, manipulation of feature size, grayscale lithography, resist thin films, and pattern transfer, while also presenting typical experimental results and applications. It introduces laser heat-mode lithography, where the resist thin films are essentially an opto-thermal response to the laser beam with changeable wavelength and are not sensitive to laser wavelength. Laser heat-mode lithography techniques greatly simplify production procedures because they require neither a particular light source nor a particular environment; further, there are no pre-baking and post-baking steps required for organic photoresists. The pattern feature size can be either larger or smaller than the laser spot by adjusting the writing strategy. The lithographic feature size can also be arbitrarily tuned from nanoscale to micrometer without changing the laser spot size. Lastly, the line edge roughness can be controlled at a very low value because the etching process is a process of breaking bonds among atoms. The book offers an invaluable reference guide for all advanced undergraduates, graduate students, researchers and engineers working in the fields of nanofabrication, lithography techniques and systems, phase change materials, etc. 224 pp. Englisch. N� de r�f. du vendeur 9789811509421

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