Articles liés à Laser Heat-Mode Lithography: Principle and Methods
Laser Heat-Mode Lithography: Principle and Methods - Couverture souple
Livre 203 sur 233: Springer Series in Materials Science
Synopsis
This book provides a systematic description and analysis of laser heat-mode lithography, addressing the basic principles, lithography system, manipulation of feature size, grayscale lithography, resist thin films, and pattern transfer, while also presenting typical experimental results and applications. It introduces laser heat-mode lithography, where the resist thin films are essentially an opto-thermal response to the laser beam with changeable wavelength and are not sensitive to laser wavelength. Laser heat-mode lithography techniques greatly simplify production procedures because they require neither a particular light source nor a particular environment; further, there are no pre-baking and post-baking steps required for organic photoresists. The pattern feature size can be either larger or smaller than the laser spot by adjusting the writing strategy. The lithographic feature size can also be arbitrarily tuned from nanoscale to micrometer without changing the laser spot size.Lastly, the line edge roughness can be controlled at a very low value because the etching process is a process of breaking bonds among atoms. The book offers an invaluable reference guide for all advanced undergraduates, graduate students, researchers and engineers working in the fields of nanofabrication, lithography techniques and systems, phase change materials, etc.
Les informations fournies dans la section « Synopsis » peuvent faire référence à une autre édition de ce titre.
À propos de l'auteur
Jingsong Wei received the Ph.D. degree in Chinese Academy of Sciences. He is currently a Professor with Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences. He has published more than 120 articles in professional journals including Applied Physics Letters, Optics Express, Optics Letters, etc. His research interests include miro/nanolithography, super-resolution optics, and optical instruments.
Les informations fournies dans la section « A propos du livre » peuvent faire référence à une autre édition de ce titre.
Résultats de recherche pour Laser Heat-Mode Lithography: Principle and Methods
Image d'archives
Laser Heat-Mode Lithography (eng)
impression à la demandeVendeur : Brook Bookstore On Demand, Napoli, NA, Italie
Évaluation du vendeur 5 sur 5 étoiles
Etat : new. Questo è un articolo print on demand. N° de réf. du vendeur c12af2205139c5b953521abfeb0d0806
Acheter neuf
EUR 86,24
Expédition à EUR 5,50
Expédition depuis Italie vers Etats-Unis
Expédition depuis Italie vers Etats-Unis
Quantité disponible : Plus de 20 disponibles
Image d'archives
Laser Heat-mode Lithography : Principle and Methods
Edité par
Springer, 2020
ISBN 10 : 981150945X
ISBN 13 : 9789811509452
Ancien ou d'occasion
Couverture souple
Vendeur : GreatBookPrices, Columbia, MD, Etats-Unis
Évaluation du vendeur 5 sur 5 étoiles
Etat : As New. Unread book in perfect condition. N° de réf. du vendeur 43303440
Acheter D'occasion
EUR 127,27
Expédition à EUR 2,37
Expédition nationale : Etats-Unis
Expédition nationale : Etats-Unis
Quantité disponible : 15 disponible(s)
Image fournie par le vendeur
Laser Heat-Mode Lithography
Edité par
Springer Nature Singapore Nov 2020, 2020
ISBN 10 : 981150945X
ISBN 13 : 9789811509452
Neuf
Taschenbuch
Vendeur : BuchWeltWeit Ludwig Meier e.K., Bergisch Gladbach, Allemagne
Évaluation du vendeur 5 sur 5 étoiles
Taschenbuch. Etat : Neu. This item is printed on demand - it takes 3-4 days longer - Neuware -This book provides a systematic description and analysis of laser heat-mode lithography, addressing the basic principles, lithography system, manipulation of feature size, grayscale lithography, resist thin films, and pattern transfer, while also presenting typical experimental results and applications. It introduces laser heat-mode lithography, where the resist thin films are essentially an opto-thermal response to the laser beam with changeable wavelength and are not sensitive to laser wavelength. Laser heat-mode lithography techniques greatly simplify production procedures because they require neither a particular light source nor a particular environment; further, there are no pre-baking and post-baking steps required for organic photoresists. The pattern feature size can be either larger or smaller than the laser spot by adjusting the writing strategy. The lithographic feature size can also be arbitrarily tuned from nanoscale to micrometer without changing the laser spot size. Lastly, the line edge roughness can be controlled at a very low value because the etching process is a process of breaking bonds among atoms. The book offers an invaluable reference guide for all advanced undergraduates, graduate students, researchers and engineers working in the fields of nanofabrication, lithography techniques and systems, phase change materials, etc. 224 pp. Englisch. N° de réf. du vendeur 9789811509452
Acheter neuf
EUR 106,99
Expédition à EUR 23
Expédition depuis Allemagne vers Etats-Unis
Expédition depuis Allemagne vers Etats-Unis
Quantité disponible : 2 disponible(s)
Image d'archives
Laser Heat-mode Lithography : Principle and Methods
Vendeur : GreatBookPrices, Columbia, MD, Etats-Unis
Évaluation du vendeur 5 sur 5 étoiles
Etat : New. N° de réf. du vendeur 43303440-n
Acheter neuf
EUR 134,74
Expédition à EUR 2,37
Expédition nationale : Etats-Unis
Expédition nationale : Etats-Unis
Quantité disponible : 15 disponible(s)
Image d'archives
Laser Heat-mode Lithography : Principle
Vendeur : Kennys Bookshop and Art Galleries Ltd., Galway, GY, Irlande
Évaluation du vendeur 5 sur 5 étoiles
Etat : New. N° de réf. du vendeur V9789811509452
Acheter neuf
EUR 129,74
Expédition à EUR 9,50
Expédition depuis Irlande vers Etats-Unis
Expédition depuis Irlande vers Etats-Unis
Quantité disponible : 15 disponible(s)
Image fournie par le vendeur
Laser Heat-Mode Lithography : Principle and Methods
Vendeur : AHA-BUCH GmbH, Einbeck, Allemagne
Évaluation du vendeur 5 sur 5 étoiles
Taschenbuch. Etat : Neu. Druck auf Anfrage Neuware - Printed after ordering - This book provides a systematic description and analysis of laser heat-mode lithography, addressing the basic principles, lithography system, manipulation of feature size, grayscale lithography, resist thin films, and pattern transfer, while also presenting typical experimental results and applications. It introduces laser heat-mode lithography, where the resist thin films are essentially an opto-thermal response to the laser beam with changeable wavelength and are not sensitive to laser wavelength. Laser heat-mode lithography techniques greatly simplify production procedures because they require neither a particular light source nor a particular environment; further, there are no pre-baking and post-baking steps required for organic photoresists. The pattern feature size can be either larger or smaller than the laser spot by adjusting the writing strategy. The lithographic feature size can also be arbitrarily tuned from nanoscale to micrometer without changing the laser spot size.Lastly, the line edge roughness can be controlled at a very low value because the etching process is a process of breaking bonds among atoms. The book offers an invaluable reference guide for all advanced undergraduates, graduate students, researchers and engineers working in the fields of nanofabrication, lithography techniques and systems, phase change materials, etc. N° de réf. du vendeur 9789811509452
Acheter neuf
EUR 124,85
Expédition à EUR 35
Expédition depuis Allemagne vers Etats-Unis
Expédition depuis Allemagne vers Etats-Unis
Quantité disponible : 1 disponible(s)
Image d'archives
Laser Heat-Mode Lithography: Principle and Methods (Springer Series in Materials Science)
Vendeur : Books Puddle, Woodside, NY, Etats-Unis
Évaluation du vendeur 4 sur 5 étoiles
Etat : New. 1st ed. 2019 edition NO-PA16APR2015-KAP. N° de réf. du vendeur 26388461950
Acheter neuf
EUR 161,35
Expédition à EUR 3,58
Expédition nationale : Etats-Unis
Expédition nationale : Etats-Unis
Quantité disponible : 4 disponible(s)
Image fournie par le vendeur
Laser Heat-Mode Lithography | Principle and Methods
Vendeur : preigu, Osnabrück, Allemagne
Évaluation du vendeur 5 sur 5 étoiles
Taschenbuch. Etat : Neu. Laser Heat-Mode Lithography | Principle and Methods | Jingsong Wei | Taschenbuch | Springer Series in Materials Science | xiii | Englisch | 2020 | Springer | EAN 9789811509452 | Verantwortliche Person für die EU: Springer Verlag GmbH, Tiergartenstr. 17, 69121 Heidelberg, juergen[dot]hartmann[at]springer[dot]com | Anbieter: preigu. N° de réf. du vendeur 119207112
Acheter neuf
EUR 95,50
Expédition à EUR 70
Expédition depuis Allemagne vers Etats-Unis
Expédition depuis Allemagne vers Etats-Unis
Quantité disponible : 5 disponible(s)
Image fournie par le vendeur
Laser Heat-Mode Lithography
Edité par
Springer, Springer Nov 2020, 2020
ISBN 10 : 981150945X
ISBN 13 : 9789811509452
Neuf
Taschenbuch
Vendeur : buchversandmimpf2000, Emtmannsberg, BAYE, Allemagne
Évaluation du vendeur 5 sur 5 étoiles
Taschenbuch. Etat : Neu. This item is printed on demand - Print on Demand Titel. Neuware -This book provides a systematic description and analysis of laser heat-mode lithography, addressing the basic principles, lithography system, manipulation of feature size, grayscale lithography, resist thin films, and pattern transfer, while also presenting typical experimental results and applications. It introduces laser heat-mode lithography, where the resist thin films are essentially an opto-thermal response to the laser beam with changeable wavelength and are not sensitive to laser wavelength. Laser heat-mode lithography techniques greatly simplify production procedures because they require neither a particular light source nor a particular environment; further, there are no pre-baking and post-baking steps required for organic photoresists. The pattern feature size can be either larger or smaller than the laser spot by adjusting the writing strategy. The lithographic feature size can also be arbitrarily tuned from nanoscale to micrometer without changing the laser spot size.Lastly, the line edge roughness can be controlled at a very low value because the etching process is a process of breaking bonds among atoms. The book offers an invaluable reference guide for all advanced undergraduates, graduate students, researchers and engineers working in the fields of nanofabrication, lithography techniques and systems, phase change materials, etc.Springer-Verlag KG, Sachsenplatz 4-6, 1201 Wien 224 pp. Englisch. N° de réf. du vendeur 9789811509452
Acheter neuf
EUR 106,99
Expédition à EUR 60
Expédition depuis Allemagne vers Etats-Unis
Expédition depuis Allemagne vers Etats-Unis
Quantité disponible : 1 disponible(s)
Image d'archives
Laser Heat-mode Lithography: Principle and Methods
Vendeur : Revaluation Books, Exeter, Royaume-Uni
Évaluation du vendeur 5 sur 5 étoiles
Paperback. Etat : Brand New. 224 pages. 9.25x6.10x0.53 inches. In Stock. N° de réf. du vendeur x-981150945X
Acheter neuf
EUR 156,17
Expédition à EUR 11,99
Expédition depuis Royaume-Uni vers Etats-Unis
Expédition depuis Royaume-Uni vers Etats-Unis
Quantité disponible : 2 disponible(s)