Articles liés à Micro Electro Mechanical System (MEMS) Technology for...

Micro Electro Mechanical System (MEMS) Technology for Multifaceted Applications - Couverture souple

Singh, Kamaljeet; Karmakar, Ayan

 
9789819661640: Micro Electro Mechanical System (MEMS) Technology for Multifaceted Applications
Couverture souple
ISBN 10 : 9819661641 ISBN 13 : 9789819661640
Editeur : Springer, 2026

Synopsis

This book details simple methodology for the realization of the practical micro devices employed in general applications. The book brings out practical concept along with process details associated with the device realization. The micro device fabrication technique is similar to MEMS and the application and methodologies are compatible to standard CMOS technologies. This book covers basic of wafer, general micro devices such as micro-heater, temperature sensor, humidity sensor, gas sensor, pyro-device along with associated characterization, integration and assembly aspects. This book provides basic overview and discusses practical aspects with characterization data. This book is targeted for the beginners and researchers providing insight into the practical aspects of this technology.

Les informations fournies dans la section « Synopsis » peuvent faire référence à une autre édition de ce titre.

Éditeur
Springer
Date d'édition
2026
Langue
anglais
ISBN 10 
9819661641
ISBN 13 
9789819661640
Reliure
Broché
Nombre de pages
180
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