Titre: Gate Dielectrics and MOS ULSIs: Principles, Technologies and Applications (Springer Series in Electronics and Photonics)
�diteur: Springer
Date de parution: 1997
Langue: anglais
ISBN � 10 chiffres: 3540631828
ISBN � 13 chiffres: 9783540631828
Reliure: Paperback
�tat de l'article: Very Good
�tat de la jaquette: No Jacket

A propos de ce titre

Synopsis

Gate Dielectrics focusses on dielectric films satisfying the superior quality gate dielectric even in large-scale integration. The information presented is rather up to date with regard to nanometer-range ultrathin gate-dielectric films, which are indispensible for submicrometer ULSIs.

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