Titre: Handbook of Microlithography, Micromachining and Microfabrication Volume 1: Microlithography
�diteur: Institution Of Engineering And Technology
Date de parution: 1997
Langue: anglais
ISBN � 10 chiffres: 0852969066
ISBN � 13 chiffres: 9780852969069
Reliure: Couverture rigide
�tat de l'article: Brand New

A propos de ce titre

Synopsis

Focusing on the use of microlithography techniques in microelectronics manufacturing, this volume is one of a series addressing a rapidly growing field affecting the integrated circuit industry. New applications in such areas as sensors, actuators and biomedical devices, are described.

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