Titre: Handbook of Microlithography, Micromachining, and Microfabrication Volume 2 (Hardbound)
�diteur: SPIE Press
Date de parution: 1997
Langue: anglais
ISBN � 10 chiffres: 0819423793
ISBN � 13 chiffres: 9780819423795
Reliure: Hard cover
�dition: illustrated Edition.

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