An Introduction to Microelectromechanical Systems Engineering

Maluf, Nadim

ISBN 10: 0890065810 / ISBN 13: 9780890065815

Edité par Artech House Publishers, 2000

May have limited writing in cover pages. Pages are unmarked. ~ ThriftBooks: Read More, Spend Less. N° de réf. du vendeur G0890065810I4N00

Synopsis :

A non-technical introduction to the field of microelectromechanical systems (MEMS). It describes in detail the materials used in producing MEMS - including silicon, polymers and glass and quartz substrates - as well as MEMS design for nozzles, sensors, valves and other applications. It examines the manufacture of commercial MEMS using technologies such as oxidation, lithography, chemical vapour deposition and silicon fusion bonding and applications in a wide range of industries including data storage, telecommunications, consumer, automotive, medical and defence. The book also addresses the future of MEMS - its potential for microelectrode arrays, actuators and optical switches and other technologies.

À propos de l'auteur: Nadim Maluf is head of research and development at NovaSensor in Fremont, California, and is Consulting Professor of Electrical Engineering at Stanford University.

Détails bibliographiques

Titre : An Introduction to Microelectromechanical ...
Éditeur : Artech House Publishers
Date d'édition : 2000
Reliure : Hardcover
Etat : Very Good
Etat de la jaquette : No Jacket
Edition : 2ème Édition