A non-technical introduction to the field of microelectromechanical systems (MEMS). It describes in detail the materials used in producing MEMS - including silicon, polymers and glass and quartz substrates - as well as MEMS design for nozzles, sensors, valves and other applications. It examines the manufacture of commercial MEMS using technologies such as oxidation, lithography, chemical vapour deposition and silicon fusion bonding and applications in a wide range of industries including data storage, telecommunications, consumer, automotive, medical and defence. The book also addresses the future of MEMS - its potential for microelectrode arrays, actuators and optical switches and other technologies.

Pr�sentation de l'�diteur

Bringing you up-to-date with the latest developments in Mems technology, this major revision of the best-selling An Introduction to Microelectromechanical Systems Engineering offers you a current understanding of this cutting-edge technology. You gain practical knowledge of Mems materials, design, and manufacturing, and learn how it is being applied in industrial, optical, medical and electronic markets. The second edition features brand new sections on Rf Mems, photo Mems, micromachining on materials other than silicon, reliability analysis, plus an expanded reference list. With an emphasis on commercialized products, this unique resource helps you determine whether your application can benefit from a Mems solution, understand how other applications and companies have benefited from Mems, and select and define a manufacturable Mems process for your application. You discover how to use Mems technology to enable new functionality, improve performance, and reduce size and cost. The book teaches you the capabilities and limitations of Mems devices and processes, and helps you communicate the relative merits of Mems to your company's management. From critical discussions on design operation and process fabrication of devices and systems, to a thorough explanation of Mems packaging, this easy-to-understand book clearly explains the basics of Mems engineering, making it an invaluable reference for your work in the field.

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