The void created by a lack of industry standards has been filled with the arrival of this cohesive guide on the design and analysis of micro-electro-mechanical systems (MEMS). Earlier MEMS books have comprehensively covered fabrication techniques, but this book's eighteen chapters written by leading experts from across the world cover a broad range of topics from transducer operations to interface circuitry, microacutators and microchanining. Issues addressed include alternative designs, reliability and cost effectiveness in the context of appropriate applications. The book satisfies a demand for literature on analysis and design of microsystems and will interest engineering and research scientists in industry and academia.

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