The void created by a lack of industry standards has been filled with the arrival of this cohesive guide on the design and analysis of micro-electro-mechanical systems (MEMS). Earlier MEMS books have comprehensively covered fabrication techniques, but this book's eighteen chapters written by leading experts from across the world cover a broad range of topics from transducer operations to interface circuitry, microacutators and microchanining. Issues addressed include alternative designs, reliability and cost effectiveness in the context of appropriate applications. The book satisfies a demand for literature on analysis and design of microsystems and will interest engineering and research scientists in industry and academia.

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Does MEMS technology offer advantages to your company's products? Will miniature machines on a chip solve your application objectives for �smaller, better, cheaper, and faster'� If you are a product development engineer or manager, the decision to design a MEMS device implies having an application and market. This book offers you a practical guide to making this important business decision. Here, both veterans and newcomers to MEMS device design will get advice on evaluating MEMS for their business, followed by guidance on selecting solutions, technologies and design support tools. You will see how experts from around the world have explored MEMS possibilities and achieved new breakthrough devices such as RF-MEMS for mobile telecommunications, micro-optics for internet hardware, catheter-based minimal-invasive operating theatre tools, and in vivo monitoring of exact dosage of medication in ailing patients. This handbook offers a wealth of analytical techniques treating problematic areas such as alternative designs reliability, packaging, and cost effectiveness.

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Articles li�s � MEMS: A Practical Guide of Design, Analysis, and Application...

MEMS: A Practical Guide of Design, Analysis, and Applications

Korvink, Jan; Paul, Oliver

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