A fully comprehensive examination of state-of-the-art technologies for measurement at the small scale

• Highlights the advanced research work from industry and academia in micro-nano devices test technology
• Written at both introductory and advanced levels, provides the fundamentals and theories
• Focuses on the measurement techniques for characterizing MEMS/NEMS devices

� propos de l?auteur

WENDONG ZHANG, North University of China, China

XIUJIAN CHOU, North University of China, China

TIELIN SHI, Huazhong University of Science and Technology, China

ZONGMIN MA, North University of China, China

HAIFEI BAO, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, China

JING CHEN, Peking University, China

LIGUO CHEN, Soochow University, China

DACHAO LI, Tianjin University, China

CHENYANG XUE, Key Laboratory of Instrument Science and Dynamic Measurement, Ministry of Education, China

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Articles li�s � Measurement Technology for Micro-Nanometer Devices

Measurement Technology for Micro-Nanometer Devices

Zhang, Wendong; Chou, Xiujian; Shi, Tielin; Ma, Zongmin; Bao, Haifei; Chen, Jingdong; Chen, Liguo; Li, Dachao; Xue, Chenyang

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