This book describes LSI process technology, and focuses on the rapid progress of state-of-the-art dynamic random access memory (DRAM) process technologies--the longstanding technology driver of Si ULSI--as they advance from the 1 Kbit to the Gbit DRAM era.

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Hiroyuki Tango

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Articles li�s � Mega-bit Memory Technology - from Mega-bit to Giga-bit...

Mega-bit Memory Technology - from Mega-bit to Giga-bit : From Mega-bit to Giga-bit

Tango, Hiroyuki (EDT)

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