Optical Imaging in Projection Microlithography

Alfred Kwok-Kit Wong

ISBN 10: 0819458295 ISBN 13: 9780819458292

Edit� par SPIE - International Society for Optical Engineering, 2005

Neuf(s) Couverture souple

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pp. xix + 254. N� de r�f. du vendeur 261528102

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Synopsis :

Here for the first time is an integrated mathematical view of the physics and numerical modeling of optical projection lithography that efficiently covers the full spectrum of the important concepts. Alfred Wong offers rigorous underpinning, clarity in systematic formulation, physical insight into emerging ideas, as well as a system level view of the parameter tolerances required in manufacturing. Readers with a good working knowledge of calculus can follow the step-by-step development, and technologists can gather general concepts and the key equations that result. Even the casual reader will gain a perspective on the key concepts, which will likely help facilitate dialog among technologists.

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D�tails bibliographiques

Titre : Optical Imaging in Projection ...
�diteur : SPIE - International Society for Optical Engineering
Date d'�dition : 2005
Reliure : Couverture souple
Etat : New

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Optical Imaging in Projection Microlithography (SPIE Tutorial Texts in Optical Engineering Vol. TT66)

Alfred Kwok-Kit Wong

Edit� par SPIE Publications, 2005

ISBN 10 : 0819458295 ISBN 13 : 9780819458292

Neuf Couverture souple

Vendeur : Kennys Bookshop and Art Galleries Ltd., Galway, GY, Irlande

�valuation du vendeur 5 sur 5 �toiles

Etat : New. An integrated mathematical view of the physics and numerical modeling of optical projection lithography that covers the full spectrum of the important concepts. Readers with a good working knowledge of calculus can follow the development, technologists can gather concepts and the equations that result. The casual reader will gain a perspective. Series: Tutorial Texts. Num Pages: 276 pages, Illustrations. BIC Classification: TJFC; TTB. Category: (P) Professional & Vocational; (UP) Postgraduate, Research & Scholarly. Dimension: 253 x 181 x 18. Weight in Grams: 662. . 2005. illustrated edition. Paperback. . . . . N� de r�f. du vendeur V9780819458292

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