Sputtering by Particle Bombardment III: Characteristics of Sputtered Particles, Technical Applications (Topics in Applied Physics)

Behrisch, R. (Contributor) / McClanahan, E.D. (Contributor) / Hofer, W.O. (Contributor) / Hauffe, W. (Contributor) / Laegreid, N. (Contributor) / Sundqvist, B.U.R. (Contributor) / Yu, M.L. (Contributor) / Wittmaack, K. (Contributor)

ISBN 10: 3662311046 / ISBN 13: 9783662311042

Edité par Springer, 2014

A propos de cet article

436 pages. 9.30x6.20x1.10 inches. In Stock.

N° de réf. du vendeur x-3662311046

Détails bibliographiques

• Titre: Sputtering by Particle Bombardment III: Characteristics of Sputtered Particles, Technical Applications (Topics in Applied Physics)
• Éditeur: Springer
• Date de parution: 2014
• Langue: anglais
• ISBN à 10 chiffres: 3662311046
• ISBN à 13 chiffres: 9783662311042
• Reliure: Paperback
• État de l'article: Brand New
• Poids: 0,57 kilogramme

A propos de ce titre

Synopsis

Sputtering, the ejection of atoms from the surface of a solid bombarded by energetic particles, is a widely observed phenomenon that has many applications in today's experimental physics and technology. This final volume in a three-part review of sputtering deals with the characterization of the sputtered particles and applications of the technique. It will be of interest to researchers in universities and in industry.