Series: Topics in Applied Physics. Num Pages: 509 pages, 201 black & white illustrations, 78 black & white tables. BIC Classification: PHV; TGM. Category: (P) Professional & Vocational. Dimension: 235 x 155 x 24. Weight in Grams: 844. . 2007. Hardback. . . . . Books ship from the US and Ireland.

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Titre: Sputtering by Particle Bombardment
�diteur: Springer-Verlag Berlin and Heidelberg GmbH & Co. KG
Date de parution: 2007
Langue: anglais
ISBN � 10 chiffres: 3540445005
ISBN � 13 chiffres: 9783540445005
Reliure: Couverture rigide
�tat de l'article: New

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Synopsis

Earlier books on this subject, i.e. "Sputtering by Particle Bombardment I - III" are nearly 20 years old, but since then a lot of new and important work has been performed and published in international journals. The planned book brings an overview about all the new results to provide a state-of-the-art report covering theoretical as well as experimental aspects of sputtering. This concerns especially a new summary of the measured and calculated sputtering yields with an algebraic approximation formula for the energy and angular dependence of the yields. This is especially useful for all colleagues, who need sputtering yields for physics and/or applied problems.

Les informations fournies dans la section � A propos du livre � peuvent faire r�f�rence � une autre �dition de ce titre.

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