Sputtering by Particle Bombardment

Wolfgang Eckstein

ISBN 10: 3540445005 / ISBN 13: 9783540445005

Edité par Springer Berlin Heidelberg, Springer Berlin Heidelberg Jul 2007, 2007

A propos de cet article

Neuware -Earlier books on this subject, i.e. 'Sputtering by Particle Bombardment I - III' are nearly 20 years old, but since then a lot of new and important work has been performed and published in international journals. The planned book brings an overview about all the new results. This concerns especially a new summary of the measured and calculated sputtering yields with an algebraic approximation formula for the energy and angular dependence of the yields. This is especially useful for all colleagues, who need sputtering yields for physics and/or applied problems. The computational methods for calculating sputtering yields are critically reviewed, Molecular dynamics calculations have not been covered in the previous books on sputtering. The influence of chemical effects on sputtering and the new models developed in the last years for understanding these effects, such as for hydrogen ion bombardment of carbon, are outlined. New developments, such as sputtering by MeV Ions and the mechanisms for understanding the effects are presented. The new results about the angular and energy distributions of sputtered atoms are presented in an extra chapter.Springer Verlag GmbH, Tiergartenstr. 17, 69121 Heidelberg 528 pp. Englisch.

N° de réf. du vendeur 9783540445005

Détails bibliographiques

• Titre: Sputtering by Particle Bombardment
• Éditeur: Springer Berlin Heidelberg, Springer Berlin Heidelberg Jul 2007
• Date de parution: 2007
• Langue: anglais
• ISBN à 10 chiffres: 3540445005
• ISBN à 13 chiffres: 9783540445005
• Reliure: Buch
• État de l'article: Neu
• Dimensions: 241 L x 160 H x 34 P (en millimètres) 241 millimètres de largeur par 160 millimètres de hauteur par 34 millimètres de profondeur
• Poids: 951 grammes

A propos de ce titre

Synopsis

Earlier books on this subject, i.e. "Sputtering by Particle Bombardment I - III" are nearly 20 years old, but since then a lot of new and important work has been performed and published in international journals. The planned book brings an overview about all the new results to provide a state-of-the-art report covering theoretical as well as experimental aspects of sputtering. This concerns especially a new summary of the measured and calculated sputtering yields with an algebraic approximation formula for the energy and angular dependence of the yields. This is especially useful for all colleagues, who need sputtering yields for physics and/or applied problems.