TEMPERATURE DEPENDENCE OF ACTUATED MEMBRANES FOR RF MEMS SWITCHES

Noel Julien

ISBN 10: 3639080637 ISBN 13: 9783639080636

Edit� par VDM Verlag Dr. Mueller Aktiengesellschaft & Co. KG, 2008

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Print on Demand pp. 88 23:B&W 6 x 9 in or 229 x 152 mm Perfect Bound on White w/Gloss Lam. N� de r�f. du vendeur 131805910

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Over the last 10 years, understanding of mechanical properties of thin film material has been essential for improving life-time operations of microelectromechanical systems (MEMS). Although, properties of bulk materials might be well characterized, thin-film properties are considerably different from those of the bulk. It cannot be assumed that mechanical properties using bulk specimens will apply to the same materials when used as a thin film. For many microelectronic thin films, material properties depend strongly on the details of the deposition processes and the growth conditions on its substrate. Temperature dependence of a MEMS switch gold thin film membrane on the pull down voltage as the temperature is varied from room temperature (300 K) to cryogenic temperature (10 K) is determined with RF MEMS shunt switches. The switch is composed of a gold coplanar waveguide structure with a gold bridge membrane suspended above an area of the center conductor which is covered by a dielectric (BaTiO3). The gold membrane is actuated by an electrostatic force acting between the transmission line and the membrane when a voltage is applied.

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Titre : TEMPERATURE DEPENDENCE OF ACTUATED MEMBRANES...
�diteur : VDM Verlag Dr. Mueller Aktiengesellschaft & Co. KG
Date d'�dition : 2008
Reliure : Couverture souple
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Temperature Dependence of Actuated Membranes for RF MEMS Switches | Applications for thin film materials in a cryogenicenvironment

Julien Noel

Edit� par VDM Verlag Dr. M�ller, 2008

ISBN 10 : 3639080637 ISBN 13 : 9783639080636

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TEMPERATURE DEPENDENCE OF ACTUATED MEMBRANES FOR RF MEMS SWITCHES: Applications for thin film materials in a cryogenic environment

Noel, Julien

Edit� par VDM Verlag, 2008

ISBN 10 : 3639080637 ISBN 13 : 9783639080636

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TEMPERATURE DEPENDENCE OF ACTUATED MEMBRANES FOR RF MEMS SWITCHES

Noel, Julien

Edit� par VDM Verlag Dr. M�ller, 2008

ISBN 10 : 3639080637 ISBN 13 : 9783639080636

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Kartoniert / Broschiert. Etat : New. Dieser Artikel ist ein Print on Demand Artikel und wird nach Ihrer Bestellung fuer Sie gedruckt. Over the last 10 years, understanding of mechanicalproperties of thin film material has been essentialfor improving life-time operations ofmicroelectromechanical systems (MEMS). Although,properties of bulk materials might be wellcharacterized, thin-film pro. N� de r�f. du vendeur 4955600

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TEMPERATURE DEPENDENCE OF ACTUATED MEMBRANES FOR RF MEMS SWITCHES

Noel, Julien

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Temperature Dependence of Actuated Membranes for RF Mems Switches (Paperback or Softback)

Noel, Julien

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Temperature Dependence of Actuated Membranes for RF MEMS Switches : Applications for thin film materials in a cryogenicenvironment

Julien Noel

Edit� par VDM Verlag Dr. M�ller, 2008

ISBN 10 : 3639080637 ISBN 13 : 9783639080636

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Taschenbuch. Etat : Neu. nach der Bestellung gedruckt Neuware - Printed after ordering - Over the last 10 years, understanding of mechanical properties of thin film material has been essential for improving life-time operations of microelectromechanical systems (MEMS). Although, properties of bulk materials might be well characterized, thin-film properties are considerably different from those of the bulk. It cannot be assumed that mechanical properties using bulk specimens will apply to the same materials when used as a thin film. For many microelectronic thin films, material properties depend strongly on the details of the deposition processes and the growth conditions on its substrate. Temperature dependence of a MEMS switch gold thin film membrane on the pull down voltage as the temperature is varied from room temperature (300 K) to cryogenic temperature (10 K) is determined with RF MEMS shunt switches. The switch is composed of a gold coplanar waveguide structure with a gold bridge membrane suspended above an area of the center conductor which is covered by a dielectric (BaTiO3). The gold membrane is actuated by an electrostatic force acting between the transmission line and the membrane when a voltage is applied.; Over the last 10 years, understanding of mechanicalproperties of thin film material has been essentialfor improving life-time operations ofmicroelectromechanical systems (MEMS). Although,properties of bulk materials might be wellcharacterized, thin-film properties are considerablydifferent from those of the bulk. It cannot beassumed that mechanical properties using bulkspecimens will apply to the same materials when usedas a thin film. For many microelectronicthin films, material properties depend strongly onthe details of the deposition processes and thegrowth conditions on its substrate.Temperature dependence of a MEMS switch gold thinfilm membrane on the pull down voltage as thetemperature is varied from room temperature(300 K) to cryogenic temperature (10 K) isdetermined with RF MEMS shunt switches. The switchis composed of a gold coplanar waveguide structurewith a gold bridge membrane suspended above an areaof the center conductor which is covered by adielectric (BaTiO3). The gold membrane is actuatedby an electrostatic force acting between thetransmission line and the membrane when a voltage isapplied. N� de r�f. du vendeur 9783639080636

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