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D�tails bibliographiques

Titre

Fundamentals of Microfabrication and Nanotechnology, Third Edition, Volume Two: Manufacturing Techniques for Microfabrication and Nanotechnology

�diteur

CRC Press

Date de parution

2011

Langue

anglais

ISBN � 10 chiffres

1420055194

ISBN � 13 chiffres

9781420055191

Reliure

hardcover

�dition

1st Edition.

�tat de l'article

Good

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A propos de ce titre

Synopsis

Designed for science and engineering students, this text focuses on emerging trends in processes for fabricating MEMS and NEMS devices. The book reviews different forms of lithography, subtractive material removal processes, and additive technologies. Both top-down and bottom-up fabrication processes are exhaustively covered and the merits of the different approaches are compared. Students can use this color volume as a guide to help establish the appropriate fabrication technique for any type of micro- or nano-machine.

� propos de l?auteur

University of California, Irvine, USA

Les informations fournies dans la section � A propos du livre � peuvent faire r�f�rence � une autre �dition de ce titre.

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