Directed Self-assembly of Block Co-polymers for Nano-manufacturing - Couverture rigide

Couverture rigide

ISBN 10 : 0081002505 ISBN 13 : 9780081002506

Editeur : Woodhead Publishing Ltd, 2015

Synopsis

The directed self-assembly (DSA) method of patterning for microelectronics uses polymer phase-separation to generate features of less than 20nm, with the positions of self-assembling materials externally guided into the desired pattern. Directed self-assembly of Block Co-polymers for Nano-manufacturing reviews the design, production, applications and future developments needed to facilitate the widescale adoption of this promising technology.

Beginning with a solid overview of the physics and chemistry of block copolymer (BCP) materials, Part 1 covers the synthesis of new materials and new processing methods for DSA. Part 2 then goes on to outline the key modelling and characterization principles of DSA, reviewing templates and patterning using topographical and chemically modified surfaces, line edge roughness and dimensional control, x-ray scattering for characterization, and nanoscale driven assembly. Finally, Part 3 discusses application areas and related issues for DSA in nano-manufacturing, including for basic logic circuit design, the inverse DSA problem, design decomposition and the modelling and analysis of large scale, template self-assembly manufacturing techniques.

A propos du livre

Présentation de l'éditeur

The directed self-assembly (DSA) method of patterning for microelectronics uses polymer phase-separation to generate features of less than 20nm, with the positions of self-assembling materials externally guided into the desired pattern. Directed self-assembly of Block Co-polymers for Nano-manufacturing reviews the design, production, applications and future developments needed to facilitate the widescale adoption of this promising technology.

Beginning with a solid overview of the physics and chemistry of block copolymer (BCP) materials, Part 1 covers the synthesis of new materials and new processing methods for DSA. Part 2 then goes on to outline the key modelling and characterization principles of DSA, reviewing templates and patterning using topographical and chemically modified surfaces, line edge roughness and dimensional control, x-ray scattering for characterization, and nanoscale driven assembly. Finally, Part 3 discusses application areas and related issues for DSA in nano-manufacturing, including for basic logic circuit design, the inverse DSA problem, design decomposition and the modelling and analysis of large scale, template self-assembly manufacturing techniques.

• Authoritative outlining of theoretical principles and modeling techniques to give a thorough introdution to the topic
• Discusses a broad range of practical applications for directed self-assembly in nano-manufacturing
• Highlights the importance of this technology to both the present and future of nano-manufacturing by exploring its potential use in a range of fields

Détails de l'édition

• Éditeur: Woodhead Publishing Ltd
• Date d'édition: 2015
• Langue: anglais
• ISBN 10: 0081002505
• ISBN 13: 9780081002506
• Reliure: Relié
• Nombre de pages: 328
• Éditeur: Gronheid Roel, Nealey Paul
• Coordonnées du fabricant: non disponible
• Personne responsable: LSWR Group; b.criscuolo@lswr.it; ; Via Spadolini, 7; Milano; Italie