Defect Recognition and Image Processing in Semiconductors 1997: Proceedings of the 7th International Conference on Defect Recognition and Image ... (Drip Vii) Held in Templin, Germany, 7-10 - Couverture rigide

Doneker, J.

 
9780750305006: Defect Recognition and Image Processing in Semiconductors 1997: Proceedings of the 7th International Conference on Defect Recognition and Image ... (Drip Vii) Held in Templin, Germany, 7-10
Couverture rigide
ISBN 10 : 0750305002 ISBN 13 : 9780750305006
Editeur : Institute of Physics Publishing, 1998

Synopsis

Defect Recognition and Image Processing in Semiconductors 1997 provides a valuable overview of current techniques used to assess, monitor, and characterize defects from the atomic scale to inhomogeneities in complete silicon wafers. This volume addresses advances in defect analyzing techniques and instrumentation and their application to substrates, epilayers, and devices. The book discusses the merits and limits of characterization techniques; standardization; correlations between defects and device performance, including degradation and failure analysis; and the adaptation and application of standard characterization techniques to new materials. It also examines the impressive advances made possible by the increase in the number of nanoscale scanning techniques now available. The book investigates defects in layers and devices, and examines the problems that have arisen in characterizing gallium nitride and silicon carbide.

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À propos de l?auteur

Doneker, J.

Les informations fournies dans la section « A propos du livre » peuvent faire référence à une autre édition de ce titre.

Éditeur
Institute of Physics Publishing
Date d'édition
1998
Langue
anglais
ISBN 10 
0750305002
ISBN 13 
9780750305006
Reliure
Relié
Nombre de pages
524
Coordonnées du fabricant
non disponible
Personne responsable
non disponible