Studies of Schottky contacts on indium phosphide: Microelectronic device applications - Couverture souple

Janardhanam, Vallivedu; Ashok Kumar, A.; R. Reddy, V.

Couverture souple

ISBN 10 : 3844301283 ISBN 13 : 9783844301281

Editeur : LAP LAMBERT Academic Publishing, 2011

Synopsis

Metal-semiconductor contacts are one of the most widely used rectifying contacts in semiconductor industry. Therefore, the fabrication of high quality Schottky contacts is essential to improve the performance of the device. InP is a material of particular interest for optoelectronic and high-speed electronic devices. In view of the important applications, the fabrication of Schottky contacts to InP is of vital importance. The contacts formed should have electrical and thermal stability with desired surface morphology. During the technological stages leading to the final device, InP substrates unavoidably undergo many thermal treatments involving rapid thermal annealing. This book includes the fabrication and characterization of Schottky contacts to InP formed with high temperature stable metals like ruthenium and molybdenum. The Schottky structures formed on InP are rapid thermal annealed and its effect on the electrical, structural properties and deep level defects are investigated. The results presnted in the book will be useful for those working in the field of semiconductor Schottky contact fabrication.

A propos du livre

À propos des auteurs

I, V. Janardhanam published 14 research articles in referred journals. My research work focuses on fabrication and characterization of high quality Schottky and ohmic contacts to single crystal and compound semiconductors for microelectronic device applications. Now I am working with Dr. C.J. Choi, SPRC, Chonbuk National University, South Korea.

I, V. Janardhanam published 14 research articles in referred journals. My research work focuses on fabrication and characterization of high quality Schottky and ohmic contacts to single crystal and compound semiconductors for microelectronic device applications. Now I am working with Dr. C.J. Choi, SPRC, Chonbuk National University, South Korea.

I, V. Janardhanam published 14 research articles in referred journals. My research work focuses on fabrication and characterization of high quality Schottky and ohmic contacts to single crystal and compound semiconductors for microelectronic device applications. Now I am working with Dr. C.J. Choi, SPRC, Chonbuk National University, South Korea.

Détails de l'édition

• Éditeur: LAP LAMBERT Academic Publishing
• Date d'édition: 2011
• Langue: anglais
• ISBN 10: 3844301283
• ISBN 13: 9783844301281
• Reliure: Broché
• Nombre de pages: 144
• Coordonnées du fabricant: non disponible
• Personne responsable: Buchpark GmbH; gpsr@buchpark.de; ; Krügerweg 1; Trebbin; Brandenburg; 14959; Allemagne