Directed Self-Assembly of Block Co-Polymers for Nano-Manufacturing (Woodhead Publishing Series in Electronic and Optical Materials)

Roel Gronheid, Paul Nealey

ISBN 10: 0081002505 / ISBN 13: 9780081002506

Edité par Woodhead Publishing Ltd 2015-08-03, 2015

A propos de cet article

N° de réf. du vendeur 6666-ELS-9780081002506

Détails bibliographiques

Titre : Directed Self-Assembly of Block Co-Polymers ...

Éditeur : Woodhead Publishing Ltd 2015-08-03

Date d'édition : 2015

Reliure : Hardcover

Etat : New

A propos de ce titre

Synopsis :

The directed self-assembly (DSA) method of patterning for microelectronics uses polymer phase-separation to generate features of less than 20nm, with the positions of self-assembling materials externally guided into the desired pattern. Directed self-assembly of Block Co-polymers for Nano-manufacturing reviews the design, production, applications and future developments needed to facilitate the widescale adoption of this promising technology.

Beginning with a solid overview of the physics and chemistry of block copolymer (BCP) materials, Part 1 covers the synthesis of new materials and new processing methods for DSA. Part 2 then goes on to outline the key modelling and characterization principles of DSA, reviewing templates and patterning using topographical and chemically modified surfaces, line edge roughness and dimensional control, x-ray scattering for characterization, and nanoscale driven assembly. Finally, Part 3 discusses application areas and related issues for DSA in nano-manufacturing, including for basic logic circuit design, the inverse DSA problem, design decomposition and the modelling and analysis of large scale, template self-assembly manufacturing techniques.

Présentation de l'éditeur:

The directed self-assembly (DSA) method of patterning for microelectronics uses polymer phase-separation to generate features of less than 20nm, with the positions of self-assembling materials externally guided into the desired pattern. Directed self-assembly of Block Co-polymers for Nano-manufacturing reviews the design, production, applications and future developments needed to facilitate the widescale adoption of this promising technology.

Beginning with a solid overview of the physics and chemistry of block copolymer (BCP) materials, Part 1 covers the synthesis of new materials and new processing methods for DSA. Part 2 then goes on to outline the key modelling and characterization principles of DSA, reviewing templates and patterning using topographical and chemically modified surfaces, line edge roughness and dimensional control, x-ray scattering for characterization, and nanoscale driven assembly. Finally, Part 3 discusses application areas and related issues for DSA in nano-manufacturing, including for basic logic circuit design, the inverse DSA problem, design decomposition and the modelling and analysis of large scale, template self-assembly manufacturing techniques.

• Authoritative outlining of theoretical principles and modeling techniques to give a thorough introdution to the topic
• Discusses a broad range of practical applications for directed self-assembly in nano-manufacturing
• Highlights the importance of this technology to both the present and future of nano-manufacturing by exploring its potential use in a range of fields