Titre: Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithography (SPIE Press Monograph Vol. PM39)
�diteur: Society of Photo-Optical Instrumentation Engineers
Date de parution: 1997
Langue: anglais
ISBN � 10 chiffres: 0819423785
ISBN � 13 chiffres: 9780819423788
Reliure: Hardcover

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Book by Harry J Levinson Mark A McCord Franco Cerrina Robe

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