Articles liés à CMOS Gate-Stack Scaling ― Materials, Interfaces...

CMOS Gate-Stack Scaling ― Materials, Interfaces and Reliability Implications: Volume 1155 - Couverture rigide

 
9781605111285: CMOS Gate-Stack Scaling ― Materials, Interfaces and Reliability Implications: Volume 1155
Couverture rigide
ISBN 10 : 1605111287 ISBN 13 : 9781605111285
Editeur : Cambridge University Press, 2009

Synopsis

To address the increasing demands of device scaling, new materials are being introduced into conventional Si CMOS processing at an unprecedented rate. Presentations collected here focus on understanding, from a chemistry and materials perspective, the mechanism of interface formation and defects at interfaces, for both conventional Si and alternative channel (Ge or III-V) systems. Several papers address reliability concerns for high-k/metal gate (basic physical models, charge trapping, etc.), while others cover characterization of the thin films and interfaces which comprise the gate stack. Topics include: advanced Si-based gate stacks; and alternate channel materials.

Les informations fournies dans la section « Synopsis » peuvent faire référence à une autre édition de ce titre.

Présentation de l'éditeur

To address the increasing demands of device scaling, new materials are being introduced into conventional Si CMOS processing at an unprecedented rate. Presentations collected here focus on understanding, from a chemistry and materials perspective, the mechanism of interface formation and defects at interfaces, for both conventional Si and alternative channel (Ge or III-V) systems. Several papers address reliability concerns for high-k/metal gate (basic physical models, charge trapping, etc.), while others cover characterization of the thin films and interfaces which comprise the gate stack. Topics include: advanced Si-based gate stacks; and alternate channel materials.

Les informations fournies dans la section « A propos du livre » peuvent faire référence à une autre édition de ce titre.

Éditeur
Cambridge University Press
Date d'édition
2009
Langue
anglais
ISBN 10 
1605111287
ISBN 13 
9781605111285
Reliure
Relié
Nombre de pages
194
Éditeur
Demkov Alexander A., Taylor Bill, Harris H. Rusty, Butterbaugh Jeffery W., Rachmady Willy
Coordonnées du fabricant
non disponible
Personne responsable
Avery
https://www.avery.fr/

chemin des peupliers 27
Dardilly
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