Advanced plasma technology (26 résultats)

Etat : New.

Etat : New.

Taschenbuch. Etat : Neu. Plasma and Low- Dielectric Materials | Interaction and Application in Advanced Semiconductor Technology | Junjing Bao | Taschenbuch | Einband - flex.(Paperback) | Englisch | 2009 | VDM Verlag Dr. Müller | EAN 9783639153019 | Verantwortliche Person für die EU: OmniScriptum GmbH & Co. KG, Bahnhofstr. 28, 66111 Saarbrücken, info[at]akademikerverlag[dot]de | Anbieter: preigu.…

Taschenbuch. Etat : Sehr gut. Gebraucht - Sehr gut SG - leichte Beschädigungen oder Verschmutzungen, ungelesenes Mängelexemplar, gestempelt - This book introduces a new technology for environmental protection, namely plasma cleaning. It brings together technological advances and research on plasma generators and their application in environmental science and engineering, including contaminated soil remediation, waste water degradation, metal recovery from waste solution, sterilization and polluted air remediation. It provides a balanced and comprehensive discussion of the core principles, novel plasma reactors and diagnostics, and state-of-the-art environmental applications of plasma. As such, it represents a valuable reference guide for scientists, engineers and graduate students in the fields of environmental science and plasma physics.…

Etat : New. pp. 90.

Etat : New. pp. IX, 143 17 illus. 1 Edition NO-PA16APR2015-KAP.

Etat : New.

Hardcover. Etat : New. HardCover.Pub Date:2021-12-01 Pages:382 Language:Chinese Publisher:China Aerospace Publishing House This book introduces the research progress of low-pressure and atmospheric-pressure plasma technology in various technical fields. Written by scientists. The main contents include the application of plasma in technical fields such as polymer materials. semiconductors. solar cells. biological materials. flat-panel displays. water treatment and rocket propulsion. as well as plasma generation and .…

Hardcover. Etat : New. NEW. SHIPS FROM MULTIPLE LOCATIONS. book.

Etat : New.

Etat : New. 2024th edition NO-PA16APR2015-KAP.

Paperback. Etat : New. NEW. SHIPS FROM MULTIPLE LOCATIONS. book.

Paperback. Etat : New. NEW. SHIPS FROM MULTIPLE LOCATIONS. book.

Hardcover. Etat : gut. 2024. Performance of Plasma Sprayed Coating: Rolling Contact Fatigue Behavior and Life Evaluation (Advanced Topics in Science and Technology in China, 71, Band 71) In deutscher Sprache. pages.

Hardcover. Etat : Like New. LIKE NEW. SHIPS FROM MULTIPLE LOCATIONS. book.

Taschenbuch. Etat : Neu. nach der Bestellung gedruckt Neuware - Printed after ordering - With the scaling of devices, integration of porous ultra low-k materials into Cu interconnect becomes imperative. Low-k dielectric materials consist of methyl groups and pores incorporated into a silicon dioxide backbone structure to reduce the dielectric constant. Plasma is widely used in semiconductor industry for deposition, etching, stripping etc. This book explores the interaction between plasma and low-k dielectric materials and their application in advanced semiconductor processes. It mainly consists of two parts. First, plasma assists the atomic layer deposition of Ta based Cu barriers. Experiments, coupled with Monte Carlo simulation proved that plasma alters low-k surfaces and generates favorable surface function groups for subsequent Ta/TaN deposition. Second, plasma degrades properties of low-k materials through methyl depletion. Mechanism of plasma damage to blanket and pattern low-k films was discussed. Then techniques for low-k repair, such as methane beam and silylation, were demonstrated.…

Etat : New. Print on Demand pp. 90.

Etat : New. Print on Demand pp. IX, 143 17 illus.

Etat : New. Print on Demand.

Etat : New. PRINT ON DEMAND pp. 90.

Etat : New. PRINT ON DEMAND pp. IX, 143 17 illus.

Etat : New. PRINT ON DEMAND.

Etat : New. Print on Demand.

Etat : New. Print on Demand.

Etat : New. PRINT ON DEMAND.

Etat : New. PRINT ON DEMAND.