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Edité par Cambridge University Press, 2014
ISBN 10 : 1107413214 ISBN 13 : 9781107413214
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Edité par Warrendale, Pa., Materials Research Society, 1999
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Ajouter au panierHardcover. 246 S. Ehem. Bibliotheksexemplar mit Bib.-Signatur und Stempel in GUTEM Zustand. Kaum Gebrauchsspuren. 1558994521 Sprache: Englisch Gewicht in Gramm: 550.
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ISBN 10 : 1107413214 ISBN 13 : 9781107413214
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Ajouter au panierPaperback. Etat : New.
Langue: anglais
Edité par Cambridge University Press, 2014
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Edité par Cambridge University Press CUP, 2014
ISBN 10 : 1107413214 ISBN 13 : 9781107413214
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Ajouter au panierEtat : New. pp. 334.
Langue: anglais
Edité par Cambridge University Press, 2014
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Edité par Cambridge University Press, 2014
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Ajouter au panierTaschenbuch. Etat : Neu. Druck auf Anfrage Neuware - Printed after ordering - Microelectromechanical systems (MEMS) hold great promise for sensing and actuating on the micron scale. There is a hierarchy of increasing difficulty for placing MEMS devices in the field. Devices that do not allow contact between structural members rely mainly on mechanical properties of freestanding films. High-resolution techniques must be developed within the framework of MEMS to measure properties such as modulus and residual stress. When contact and rubbing contact are allowed, the complexities of adhesion and friction at the microscale must be understood and well controlled. Fluid interactions are similarly important for microfluidic devices. Packaging of MEMS for use in the field also requires special consideration, because it is often application specific. This book investigates various materials, characterization methods and processing techniques. These approaches represent different but useful strategies to solve MEMS challenges, and must be integrated for product realization. Topics include: deposition and characterization of Si; materials and processes for MEMS; tribology; dynamic optical characterization; packaging; LIGA; materials aspects; and characterization of MEMS processing.
Langue: anglais
Edité par Cambridge University Press, 2014
ISBN 10 : 1107413214 ISBN 13 : 9781107413214
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Ajouter au panierPaperback. Etat : Brand New. 1st edition. 334 pages. 9.02x5.98x0.71 inches. In Stock. This item is printed on demand.
Langue: anglais
Edité par Cambridge University Press, 2014
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Ajouter au panierPaperback / softback. Etat : New. This item is printed on demand. New copy - Usually dispatched within 5-9 working days.
Langue: anglais
Edité par Cambridge University Press, 2014
ISBN 10 : 1107413214 ISBN 13 : 9781107413214
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Ajouter au panierEtat : New. Print on Demand pp. 334.
Langue: anglais
Edité par Cambridge University Press, 2014
ISBN 10 : 1107413214 ISBN 13 : 9781107413214
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Ajouter au panierEtat : New. PRINT ON DEMAND pp. 334.
Langue: anglais
Edité par Cambridge University Press, Cambridge, 2014
ISBN 10 : 1107413214 ISBN 13 : 9781107413214
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Ajouter au panierPaperback. Etat : new. Paperback. Microelectromechanical systems (MEMS) hold great promise for sensing and actuating on the micron scale. There is a hierarchy of increasing difficulty for placing MEMS devices in the field. Devices that do not allow contact between structural members rely mainly on mechanical properties of freestanding films. High-resolution techniques must be developed within the framework of MEMS to measure properties such as modulus and residual stress. When contact and rubbing contact are allowed, the complexities of adhesion and friction at the microscale must be understood and well controlled. Fluid interactions are similarly important for microfluidic devices. Packaging of MEMS for use in the field also requires special consideration, because it is often application specific. This book investigates various materials, characterization methods and processing techniques. These approaches represent different but useful strategies to solve MEMS challenges, and must be integrated for product realization. Topics include: deposition and characterization of Si; materials and processes for MEMS; tribology; dynamic optical characterization; packaging; LIGA; materials aspects; and characterization of MEMS processing. The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners. This item is printed on demand. Shipping may be from our UK warehouse or from our Australian or US warehouses, depending on stock availability.
Langue: anglais
Edité par Cambridge University Press, 2012
ISBN 10 : 1107413214 ISBN 13 : 9781107413214
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Ajouter au panierEtat : New. Dieser Artikel ist ein Print on Demand Artikel und wird nach Ihrer Bestellung fuer Sie gedruckt. The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.KlappentextThe MRS Symposium Proceeding series is an internationally recognised reference suitable for research.