Vendeur : Chiron Media, Wallingford, Royaume-Uni
EUR 56,98
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Ajouter au panierHardcover. Etat : New.
Vendeur : Revaluation Books, Exeter, Royaume-Uni
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Ajouter au panierHardcover. Etat : Brand New. 100 pages. 9.25x6.25x0.75 inches. In Stock.
Vendeur : Majestic Books, Hounslow, Royaume-Uni
EUR 68,42
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Ajouter au panierEtat : New. pp. 136.
Vendeur : Books Puddle, New York, NY, Etats-Unis
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Ajouter au panierEtat : New. pp. 136.
Langue: anglais
Edité par ISTE Press Ltd - Elsevier Inc, 2017
ISBN 10 : 1785480960 ISBN 13 : 9781785480966
Vendeur : THE SAINT BOOKSTORE, Southport, Royaume-Uni
EUR 71,85
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Ajouter au panierHardback. Etat : New. New copy - Usually dispatched within 4 working days.
Vendeur : Biblios, Frankfurt am main, HESSE, Allemagne
EUR 76,84
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Ajouter au panierEtat : New. pp. 136.
Vendeur : Brook Bookstore On Demand, Napoli, NA, Italie
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Ajouter au panierEtat : new. Questo è un articolo print on demand.
Vendeur : BuchWeltWeit Ludwig Meier e.K., Bergisch Gladbach, Allemagne
EUR 150
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Ajouter au panierBuch. Etat : Neu. This item is printed on demand - it takes 3-4 days longer - Neuware -Plasma etching has long enabled the perpetuation of Moore's Law. Today, etch compensation helps to create devices that are smaller than 20 nm. But, with the constant downscaling in device dimensions and the emergence of complex 3D structures (like FinFet, Nanowire and stacked nanowire at longer term) and sub 20 nm devices, plasma etching requirements have become more and more stringent.Now more than ever, plasma etch technology is used to push the limits of semiconductor device fabrication into the nanoelectronics age. This will require improvement in plasma technology (plasma sources, chamber design, etc.), new chemistries (etch gases, flows, interactions with substrates, etc.) as well as a compatibility with new patterning techniques such as multiple patterning, EUV lithography, Direct Self Assembly, ebeam lithography or nanoimprint lithography.This book presents these etch challenges and associated solutions encountered throughout the years for transistor realization. Englisch.
Vendeur : AHA-BUCH GmbH, Einbeck, Allemagne
EUR 154,51
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Ajouter au panierBuch. Etat : Neu. nach der Bestellung gedruckt Neuware - Printed after ordering - Plasma etching has long enabled the perpetuation of Moore's Law. Today, etch compensation helps to create devices that are smaller than 20 nm. But, with the constant downscaling in device dimensions and the emergence of complex 3D structures (like FinFet, Nanowire and stacked nanowire at longer term) and sub 20 nm devices, plasma etching requirements have become more and more stringent.Now more than ever, plasma etch technology is used to push the limits of semiconductor device fabrication into the nanoelectronics age. This will require improvement in plasma technology (plasma sources, chamber design, etc.), new chemistries (etch gases, flows, interactions with substrates, etc.) as well as a compatibility with new patterning techniques such as multiple patterning, EUV lithography, Direct Self Assembly, ebeam lithography or nanoimprint lithography.This book presents these etch challenges and associated solutions encountered throughout the years for transistor realization.